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040 _beng
040 _cIN-NITTTR
041 _aeng
082 _a621.38173 M29A
100 _aMaly, W.
245 0 _aAtlas of IC technologies :
_b an introduction to VLSI processes. /
_cMaly, W.
942 _2ddc
_cBK
999 _c21979
_d21979