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| 003 | IN-NITTTR | ||
| 005 | 20251114233227.0 | ||
| 008 | 251113s9999||||xx |||||||||||||| ||eng|| | ||
| 040 | _beng | ||
| 040 | _cIN-NITTTR | ||
| 041 | _aeng | ||
| 082 | _a621.38173 E58I | ||
| 100 | _aElliot, David J. | ||
| 245 | 0 |
_aIntegrated circuit fabrication technology. / _cElliot, David J. |
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_2ddc _cBK |
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