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| 001 | 24845 | ||
| 003 | IN-NITTTR | ||
| 005 | 20251114233317.0 | ||
| 008 | 251113s9999||||xx |||||||||||||| ||eng|| | ||
| 040 | _beng | ||
| 040 | _cIN-NITTTR | ||
| 041 | _aeng | ||
| 082 | _a621.38152 | ||
| 100 | _aCampbell, Stephen A. | ||
| 245 | 4 |
_aThe science and engineering of microelectronic fabrication / _cCampbell, Stephen A. |
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| 942 |
_2ddc _cBK |
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| 999 |
_c27474 _d27474 |
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