000 00453nam a2200169Ia 4500
001 29570
003 IN-NITTTR
005 20251114233403.0
008 251113s9999||||xx |||||||||||||| ||eng||
040 _beng
040 _cIN-NITTTR
041 _aeng
082 _a629.892 M42R
100 _aMathia, Karl
245 0 _aRobotics for electronics manufacturing :
_b principles and applications in cleanroom automation /
_cMathia, Karl
942 _2ddc
_cBK
999 _c32198
_d32198